TPM 004X-031R-5P01-053B-W1-189 LP120-MO1-10-111-000 LP120S-MF1-10-11-1 (obsolete - replaced by LP120S-MF1-10-11-1) 20025858 VDS063 LP 120 M01 10-110 MSK 070 LP 090-M01-3 -111-001 VDH050-MF1-16-131R ZMT 300-PD5-100-004-L1 SP140S-MF2-25-2K1-2S SK+100S-MF1-5-0H1-1K00 S/N: 2725851 HG+140S-MF2-12-6K1-1S10 TP+110-S-MF2-16 TP+110-MA2-22, DRIVE UNIT Y-AXIS ZST500-PE5-1000X, GUIDE TUBE ZST600-PE5-1000X, X-AXIS